6 HS_SiH3.mmp Si -1.097000 -0.006000 0.000000 S 1.072000 0.045000 0.000000 H -1.527000 1.414000 0.000000 H -1.619000 -0.697000 1.209000 H -1.619000 -0.697000 -1.209000 H 1.214000 -1.296000 0.000000