6 HO_SiH3.mmp Si -0.574000 0.001000 0.000000 O 1.106000 0.047000 0.000000 H -1.014000 1.415000 0.000000 H -1.096000 -0.701000 1.207000 H -1.096000 -0.701000 -1.207000 H 1.584000 -0.789000 0.000000