5
F_SiH3.mmp
Si 0.000000 0.000000 -0.594000
F 0.000000 0.000000 1.042000
H -0.705000 1.222000 -1.053000
H -0.705000 -1.222000 -1.053000
H 1.411000 0.000000 -1.053000