5 Cl_SiH3.mmp Si 0.000000 0.000000 -1.084000 Cl 0.000000 0.000000 1.002000 H -0.704000 1.219000 -1.552000 H -0.704000 -1.219000 -1.552000 H 1.407000 0.000000 -1.552000